Patent holder (s):
PJSC “State Research and Design Institute of Rare-Metal Industry “Giredmet”
P.A. Averichkin, B.N. Levonovich, Y.N. Parkhomenko, A.A. Shlyonsky, N.N. Shmatov
The invention can be used for producing quartz containers with protective coating for high-temperature processes. Organic silanes with silicon and carbon atomic ratio equal to 1,0:(1,0÷4,0) are used as basic carbon-contained compound. Coating formation is performed by serial multiple alternation of processes including organic silane wetting of container surface, and its drying at normal conditions, producing polymer film and anneal. First annealing of deposited polymer film is performed in oxidizing atmosphere at 450-650°С during 20-30 minutes; and second and following annealings of deposited polymer film to formed oxide coating are performed in inert atmosphere at 700-800°С during 30-60 minutes. The invention allows improving of protective coating quality at container quartz surfaces due to increase of their density and strength preventing interaction of molten metal with omniform container working walls and reduction of produced material contamination by quartz chemical element diffused impurities.