Patent holder (s):
PJSC “State Research and Design Institute of Rare-Metal Industry “Giredmet”
D.V. Nazarkin, A.V. Elyutin, A.M. Chapygin, A.A. Kokh, A.A. Arkadyev, V.V. Apanasenko
Process for producing thrichlorosilane includes hydrogen chloride synthesis; thrichlorosilane synthesis with thrichlorosilane production in gas-vapor mixture also containing silicon tetrachloride, hydrogen and hydrogen chloride; chlorosilane condensation with hydrogen and hydrogen chloride separation; produced condensate rectification with thrichlorosilane and silicon tetrachloride separation and thrichlorosilane and silicon tetrachloride treatment.