Patent holder (s):
PJSC “State Research and Design Institute of Rare-Metal Industry “Giredmet”
L.S. Ivanov, V.G. Levin, D.V. Nazarkin, V.V. Mitin, A.V. Elyutin, V.A. Kharchenko
The invention relates to production of polycrystal silicon by closed cycle and to apparatus for conversion of silicon tetrachloride generated in the process of producing polycrystalline silicon into thrichlorosilane. Apparatus for silicon tetrachloride hydrogenation includes body with branch pipes for feed and output of gas-vapor mixture into reaction chamber; heaters made in the form of plates and connected to input leads isolated from body.