Patent holder (s):
PJSC “State Research and Design Institute of Rare-Metal Industry “Giredmet”
L.S. Ivanov, V.G. Levin, D.V. Nazarkin, V.V. Mitin, A.V. Elyutin, V.A. Kharchenko
The invention relates to methods for producing thrichlorosilane from silicon tetrachloride and can be used for utilization of silicon tetrachloride generated in the process of producing polycrystalline silicon by thrichlorosilane hydrogen reduction. Technological effect of the claimed process is the increase of technical and economic coefficients, increase of conversion rate in one-stage process due to creating optimal constant temperature conditions in the whole reaction volume, increase of thrichlorosilane yield due to using chemical recirculation regime, which provides full conversion of silicon tetrachloride into thrichlorosilane, and increase of equipment lifetime.