Patent holder (s):
PJSC “State Research and Design Institute of Rare-Metal Industry “Giredmet”
M.V. Vorobyova, A.V. Elyutin, L.S. Ivanov, V.V. Mitin, I.V. Petrusevich
The process can be used in producing composition materials used for production tools in the processes of producing high purity elements and substances. Base components are treated, and gas-vapor mixture of carbon and hydrogen compounds is fed into reactor. The mixture is decomposed at heated surface. Generated decomposition products and unreacted substances are removed. Fractional condensation separation and base component recirculation is performed while receiving coatings by alternation of pyrocarbon and silicon carbide layer deposition processes. Deposition is performed at product surface in one apparatus and at the same deposition surface temperature. Products produced by this method have high operational characteristics and coating quality, including high density and purity.