Development and projects
Modes of chemical recycling based superpurity silicon carbide plating technology are developed providing plating rate of 1 mm per hour and maximum silicon carbide retrieval from steam-gas mixture (40-45%) satisfying environmental requirements to technology.
Equipment and process scheme variants are developed providing experimental (single-piece) and serial manufacture of silicon carbide blade products and including substance treatment, condensation and recycling circuits. Design of semiproduction experimental plant pieces for manufacturing of superpurity silicon carbide blade products is developed.
Experimental lot of ribbon type heaters made from carbon composite materials with superpurity silicon carbide platings used in chlorosilane and hydrogen chloride medium with 1250 - Т3000С temperatures is produced.