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“Redmet 90M” setup

“Redmet 90M” setup is used for growing dislocation-free silicon monocrystals by Czochralski method.

“Redmet 90M” setup is advanced version of “Redmet” setup line and based on design solutions, which have been refined in manufacturing production for many years. It distinguishes by reliability, maintainability, ease of manufacture and operation.

 

MAIN TECHNICAL FEATURES

 

Amount of crucible load up to 210 kg
Maximum diameter of monocrystal 300 mm
Axial movement of seed up to 3000 mm
Crucible diameter 508 mm, 610 mm
Installed capability 250 kW
Seed movement rate  

operating

(0,25... 7,6) mm/min

cruise

(14...720) mm/min
Seed rotational speed (1...36) rev/min
Crucible movement rate  

operating

(0,03...0,77) mm/min
 

cruise

46 mm/min
Crucible rotational speed (1...28) rev/min
Crucible rod stroke 450 mm
Charge vacuum 5·10-2 torr
Inert gas pressure  

inlet

2,0 atm

in chamber

(5...20) torr
Inert gas discharge (1000...4000) l/hour
Water pressure  

inlet

(2...4) atm

outlet

free outlet
Water discharge up to 10 m3 /hour
Setup power supply three-phase,380/220В,Hz
Control system computer-aided
Furnace unit dimensions  

width

1900 mm

depth

2350 mm

height

7400 mm

height at elevated chamber

8200 mm
Furnace unit weight 4500 kg


 

“Redmet-90M” setup includes:

  • furnace unit;
  • power unit;
  • system of indication, monitoring and control.

 

Delivery includes the following main parts:

  • Furnace unit (partly demounted):
    frame with melting chamber1;
    crystal chamber;
    supporting column (including crystal chamber elevate actuator);
    vacuum gate valve;
    seed rotary and move actuator;
    crucible rotary and move actuator;
    gas-vapor system (pumps, pipelines, filters);
    water cooling system;
  • indication, monitoring and control system cabinet;
  • power unit;
  • accompanying technical documentation;
  • spare parts, tools, devices2.

 

1Furnace can be supplied by additional customer demand.

2Gallery for maintenance of crucible additional loading unit upper actuator, collet pickup and handling, etc. can be supplied by additional customer demand.

 

redmet90-2-eng.jpg

 

redmet90-1-eng.jpg